| 新旧程度：3成新 | 型号：lam 2300 exelan flex | 设备所在地：美国 |
| 设备生产产地：美国，日本 |
LAM RESEARCH 2300 Exelan Flex EX+Etcher/Asher 是一款小巧但功能强大的机器，旨在确保在广泛的蚀刻和灰化过程中获得***的效果。它适用于各种生产和研究应用，如反兴奋剂研究和高效的离子束溅射蚀刻。这款蚀刻器具备多种功能，可提供性能和可靠性。它适用于安全地加工各种尺寸、形状和厚度的金属、陶瓷或聚合物基板。Exelan Flex EX+以高可靠性而设计，是许多蚀刻和灰化过程的理想解决方案。
LAM Research 2300 Exelan Flex Dielectric Etch
Currently Configured for 300mm wafer size
Vintage: 2002?
EQUIPMENT DETAILS:
Tool Status: In Production.
Originally bought as a single chamber system. (Tool is a 4 chamber configuration.)
Original PO config: to include the following:
2300 Exelan CFE PM, 300mm
2300 Exelan Options -1600 L/S Edwards Turbo Pump
PM *** Valve: Chemraz Rocker Valve
NSR5247_A: FLEX Configuration
2300 Exelan Quick Clean Kit
2300 Exelan Pend. Valve Kit
2300 Exelan Gas Box
Regulated Inlet (per Gas Line) -12 Gas Configuration
Aera FC-D980CU MFC –
NSR5248_A: Line 11 100sccm O2/He (30%)
Delta Stacking Kit
* 2300 Platform
3 FOUP
WIDS BTM Read
User Interface: Side and Front Monitor
SYSTEM UPS CIRCUITRY
CABLE: TM-SUBPANEL, 50FT
SYS CALIBRATION AND ALIGNMENT
TM NSR 1: VTM Dynamic Alignment
